4"
Wafer Carrier (Ultrapak)
Assembly
overall size |
163mm¡¿146mm¡¿120mm
(6.4"¡¿5.8"¡¿4.7") |
Cassette |
D1 |
14.53mm
(0.57") |
Pitch |
4.76
(0.19") |
Overall
size |
143mm¡¿126mm¡¿108mm
(5.6"¡¿5.0"¡¿4.3") |
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